EGEC 523A - VLSI and Nano Technology and Devices (3)

Silicon crystal, PN junction physics, oxide and interface physics and wafer fabrication technology; oxidation, diffusion, ion-implantation, epitaxy, photolithography and thin films process. Layout design principle for integrated circuits. Nano-electronic devices and technology.

Prerequisite: EGEC 455 or graduate standing.

Graduate-level

Typically Offered: Spring periodically