Jan 15, 2025  
2019-2020 University Catalog 
    
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2019-2020 University Catalog [ARCHIVED CATALOG]

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EGEE 523A - VLSI and Nano Technology and Devices (3)

Silicon crystal, PN junction physics, oxide and interface physics and wafer fabrication technology; oxidation, diffusion, ion-implantation, epitaxy, photolithography and thin films process. Layout design principle for integrated circuits. Nano-electronic devices and technology.

Prerequisite: EGEE 455 .

Graduate-level


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