Jan 20, 2020  
2017-2018 University Catalog 
    
2017-2018 University Catalog [ARCHIVED CATALOG]

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EGEE 523A - VLSI and Nano Technology and Devices (3)


Silicon crystal, PN junction physics, oxide and interface physics and wafer fabrication technology; oxidation, diffusion, ion-implantation, epitaxy, photolithography and thin films process. Layout design principle for integrated circuits. Nano-electronic devices and technology.

Prerequisite: EGEE 455  



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