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Mar 29, 2024
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EGEE 523A - VLSI and Nano Technology and Devices (3) Silicon crystal, PN junction physics, oxide and interface physics and wafer fabrication technology; oxidation, diffusion, ion-implantation, epitaxy, photolithography and thin films process. Layout design principle for integrated circuits. Nano-electronic devices and technology.
Prerequisite: EGEE 455
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